论文标题

四级传输电子显微镜架的紧凑设计用于准四维表征

A Compact Design of Four-degree-of-freedom Transmission Electron Microscope Holder for Quasi-Four-Dimensional Characterization

论文作者

Zhang, Yizhi, Bu, Yeqiang, Fang, Xiaoyang, Wang, Hongtao

论文摘要

电子断层扫描(ET)已被证明是解决具有挑战性问题的强大工具,例如了解各种微观结构之间的3D相互作用。将ET推进到更广泛的应用中需要新颖的仪器设计,以在理论和实践中打破瓶颈。在这项工作中,我们构建了一个紧凑的四级自由度(三个方向位置加自动移动)纳米操纵器,该纳米操纵器专用于ET应用,这称为X-Nano Translans Electron显微镜(TEM)持有人。四个自由度的所有运动都是由内置的压电执行器驱动的,由于TEM阶段的振动和漂移而使人工制品最小化。完整的360o旋转在整个范围内的精度为0.05o,这解决了缺失的楔形问题。同时,样品可以使用集成的3D纳米操纵器移至旋转轴,从而大大减少了在倾斜过程中跟踪样品位置的努力。同时,可以将原位刺激函数无缝集成到X-Nano TEM持有器中,以便可以发现动态信息。我们预计,在不久的将来,可以通过该持有人进行广泛的研究,例如大约3D微结构演化的研究。

Electron tomography (ET) has been demonstrated to be a powerful tool in addressing challenging problems, such as understanding 3D interactions among various microstructures. Advancing ET to broader applications requires novel instrumentation design to break the bottlenecks both in theory and in practice. In this work, we built a compact four-degree-of-freedom (three-directional positionings plus self-rotation) nano-manipulator dedicated to ET applications, which is called X-Nano transmission electron microscope (TEM) holder. All the movements of the four degrees of freedom are precisely driven by built-in piezoelectric actuators, minimizing the artefacts due to the vibration and drifting of the TEM stage. Full 360o rotation is realized with an accuracy of 0.05o in the whole range, which solves the missing wedge problem. Meanwhile, the specimen can move to the rotation axis with an integrated 3D nano-manipulator, greatly reducing the effort in tracking sample locations during tilting. Meanwhile, in-situ stimulation function can be seamlessly integrated into the X-Nano TEM holder so that dynamic information can be uncovered. We expect that more delicate researches, such as those about 3D microstructural evolution, can be carried out extensively by means of this holder in the near future.

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