论文标题
杂交启动微型演员的静态引进行为：仿真，建模和实验研究
Static Pull-in Behavior of Hybrid Levitation Micro-Actuators: Simulation, Modelling and Experimental Study
论文作者
论文摘要
在本文中，提出了基于有限元分析和分析模型的系统和全面方法，用于研究混合闪光微型演员中的静态引进现象。基于拉格朗日形式主义的电磁脱位微型演员的有限元模型是由于最新的灯丝循环之间相互电感分析计算的进展而制定和开发的。特别是，开发的有限元模型使我们能够准确有效地计算悬浮的微对象内诱导的涡流的分布。同时，这一事实提供了制定分析模型的原因，在该模型中，诱导的涡流的分布可以由一个由圆形灯丝表示的电路近似。反过来，两个开发的模型都预测了杂交闪光微型演员的静态引进参数，而无需求解非线性微分方程。通过与实验结果的比较，通过开发的准芬特元件和分析模型获得的建模结果得到了验证。
In this article, a systematic and comprehensive approach based on finite element analysis and analytical modelling for studying static pull-in phenomena in hybrid levitation micro-actuators is presented. A finite element model of electromagnetic levitation micro-actuators based on the Lagrangian formalism is formulated and developed as a result of recent progress in the analytical calculation of mutual inductance between filament loops. In particular, the developed finite element model allows us to calculate accurately and efficiently a distribution of induced eddy current within a levitated micro-object. At the same time, this fact provides a reason for formulating the analytical model in which the distribution of the induced eddy current can be approximated by one circuit represented by a circular filament. In turn, both developed models predict the static pull-in parameters of hybrid levitation micro-actuators without needs for solving nonlinear differential equations. The results of modelling obtained by means of the developed quasi-finite element and analytical model are verified by the comparison with experimental results.
