论文标题
在近红外的单光子灵敏度的超导探测器
Superconducting microwire detectors with single-photon sensitivity in the near-infrared
论文作者
论文摘要
我们报告了对线敏感的WSI超导探测器的制造和表征，其线宽度从1μm到3μm。这些设备在1.55μm波长下实现饱和的内部检测效率，并表现出最大计数速率超过10^5 s^-1。我们还研究了用于这些设备的富含硅的WSI膜的材料特性。我们发现，许多具有数百微米的活性长度的设备表现出超过流动电流50％的临界电流。在362x362μm^2的表面积上显示了一个具有2.0μm线宽度的曲折检测器，展示了达到的材料和设备质量。
We report on the fabrication and characterization of single-photon-sensitive WSi superconducting detectors with wire widths from 1 μm to 3 μm. The devices achieve saturated internal detection efficiency at 1.55 μm wavelength and exhibit maximum count rates in excess of 10^5 s^-1. We also investigate the material properties of the silicon-rich WSi films used for these devices. We find that many devices with active lengths of several hundred microns exhibit critical currents in excess of 50% of the depairing current. A meandered detector with 2.0 μm wire width is demonstrated over a surface area of 362x362 μm^2, showcasing the material and device quality achieved.
