论文标题
准周期显微镜图像的基于学习的缺陷识别
Learning-based Defect Recognition for Quasi-Periodic Microscope Images
论文作者
论文摘要
控制晶体材料缺陷至关重要,因为它们会影响材料的性质,这可能有害或有益于设备的最终性能。高分辨率(扫描)透射电子显微镜[HR(S)TEM]可以实现子纳米量表上的缺陷分析,其中目前根据人类专业知识进行了缺陷的鉴定。但是,该过程是乏味,高度耗时的,在某些情况下会产生模棱两可的结果。在这里,我们提出了一种半监督的机器学习方法,该方法有助于检测原子分辨率显微镜图像的晶格缺陷。它涉及一个卷积神经网络,该网络将图像贴片分类为有缺陷或无缺陷的启发式,它是一种基于图形的启发式,它选择了一个非缺陷的贴片作为模型,最后是一个自动生成的卷积滤波器库,突出了对称性破坏,例如堆叠故障,双偏见和晶粒边界。此外,我们建议一个方差过滤器以分段无定形区域和梁缺陷。该算法在IIII-V/SI晶体材料上进行了测试,并针对不同的指标进行了成功评估,即使对于极小的训练数据集也显示出令人鼓舞的结果。通过将数据驱动的分类通用性,鲁棒性和深度学习的速度与图像过滤器的有效性相结合,我们可以向微观主义者社区提供有价值的开源工具,从而可以简化晶体材料的未来人力资源分析。
Controlling crystalline material defects is crucial, as they affect properties of the material that may be detrimental or beneficial for the final performance of a device. Defect analysis on the sub-nanometer scale is enabled by high-resolution (scanning) transmission electron microscopy [HR(S)TEM], where the identification of defects is currently carried out based on human expertise. However, the process is tedious, highly time consuming and, in some cases, yields ambiguous results. Here we propose a semi-supervised machine learning method that assists in the detection of lattice defects from atomic resolution microscope images. It involves a convolutional neural network that classifies image patches as defective or non-defective, a graph-based heuristic that chooses one non-defective patch as a model, and finally an automatically generated convolutional filter bank, which highlights symmetry breaking such as stacking faults, twin defects and grain boundaries. Additionally, we suggest a variance filter to segment amorphous regions and beam defects. The algorithm is tested on III-V/Si crystalline materials and successfully evaluated against different metrics, showing promising results even for extremely small training data sets. By combining the data-driven classification generality, robustness and speed of deep learning with the effectiveness of image filters in segmenting faulty symmetry arrangements, we provide a valuable open-source tool to the microscopist community that can streamline future HR(S)TEM analyses of crystalline materials.