论文标题

SNO(001)膜的等离子体辅助分子束外延:亚亮相,孔传输特性,Seebeck系数和有效的孔质量

Plasma-assisted molecular beam epitaxy of SnO(001) films: Metastability, hole transport properties, Seebeck coefficient, and effective hole mass

论文作者

Budde, Melanie, Mazzolini, Piero, Feldl, Johannes, Golz, Christian, Nagata, Takahiro, Ueda, Shigenori, Hoffmann, Georg, Ramsteiner, Manfred, Bierwagen, Oliver

论文摘要

透明导电或半导体氧化物是(透明)光电和电力电子应用的重要材料。尽管这些氧化物中的大多数只能以100cm^2/vs p型氧化物的顺序掺入N型N型,以实现PN结式设备,但通常遭受升高(<< 1cm^2/vs)孔迁移率。锡一氧化碳(SNO)是较高的P型氧化物之一,具有较高的孔迁移率,缺乏对其孔传输特性的完善的理解。此外,SNO的增长与SNO2和SN相对于SNO的亚稳定性变得复杂,这需要同志,以实现通常需要高端应用所需的单晶材料。在这里,我们全面说明了SNO的外延生长,其(元)稳定性及其在本文中的热电运输特性。纹理和单晶,无意间的P型SNO(001)膜是由血浆辅助分子束外延生长的。理论上通过平衡相图来解决这种半导体氧化物的亚稳定性。在实验上,相关的SNO生长窗口是通过原位生长动力学研究迅速确定的,这是SN-O-O-El-plasma通量比率和生长温度的功能。通过不同的方法对二次SN和SNOX(1 <x <= 2)相的存在进行了全面研究,表明SN3O4或SN作为主要的二级相,以及完全氧化的SNO2膜表面。考虑到其各向异性孔有效的质量,确定并进行了严格讨论的孔传输特性,Seebeck系数和有效质量的有效质量。

Transparent conducting or semiconducting oxides are important materials for (transparent) optoelectronics and power electronics applications. While most of these oxides can be doped n-type only with room-temperature electron mobilities on the order of 100cm^2/Vs p-type oxides are needed for the realization of pn-junction devices but typically suffer from exessively low (<<1cm^2/Vs) hole mobilities. Tin monoxide (SnO) is one of the few p-type oxides with a higher hole mobility, lacking a well-established understanding of its hole transport properties. Moreover, growth of SnO is complicated by its metastability with respect to SnO2 and Sn, requiring epitaxy for the realization of single crystalline material typically required for high-end applications. Here, we give a comprehensive account on the epitaxial growth of SnO, its (meta)stability, and its thermoelectric transport properties in the context of the present literature. Textured and single-crystalline, unintentionally-doped p-type SnO(001) films are grown by plasma-assisted molecular beam epitaxy. The metastability of this semiconducting oxide is addressed theoretically through an equilibrium phase diagram. Experimentally, the related SnO growth window is rapidly determined by an in-situ growth kinetics study as function of Sn-to-O-plasma flux ratio and growth temperature. The presence of secondary Sn and SnOx (1 < x <= 2) phases is comprehensively studied by different methods, indicating the presence of Sn3O4 or Sn as major secondary phases, as well as a fully oxidized SnO2 film surface. The hole transport properties, Seebeck coefficient, and density-of-states effective mass are determined and critically discussed in the context of the present literature on SnO, considering its anisotropic hole-effective mass.

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