论文标题
使用非接触和高通量方法的石墨烯电特性表征的良好实践指南
Good Practice Guide on the electrical characterization of graphene using non-contact and high-throughput methods
论文作者
论文摘要
可以使用已经用于薄膜材料的非接触式方法来处理石墨烯的电特性，无论是在飞机板上还是正确的几何形式。但是，石墨烯的非凡薄度（以及相应的体积）使这些方法的正确应用变得困难。感兴趣的电气特性（板电阻率/电导率，电荷载体的浓度和迁移率）必须通过几何和电气建模从测量结果中间接得出；需要仔细考虑此类模型背后的假设（例如，均匀性和各向同性，所应用场等的有效价值等）。对国际单位体系的测量值以及测量不确定性的适当表达是一个问题。 本指南侧重于非接触和高通量方法，这些方法是在任何阶段都不会与任何金属电极物理接触石墨烯样品表面的方法。还提供有关联系方法的伴侣指南。讨论的方法是： - 使用扫描开尔文探针显微镜（SKPM）测量表面电位和工作功能； - 微波谐振腔测量板电阻； - 测量Terahertz时域光谱法（THZ-TDS）对薄板电阻的测量；对于每种方法，讨论了相应的测量协议，其中描述了： - 测量原理； - 样本要求和准备； - 测量设备 /设备的描述； - 校准标准和实现可追溯度量的方法；
The electrical characterisation of graphene, either in plane sheets or in properly geometrised form can be approached using non-contact methods already employed for thin film materials. The extraordinary thinness (and, correspondingly, the volume) of graphene, however, makes the proper application of these methods difficult. The electrical properties of interest (sheet electrical resistivity/conductivity, concentration and mobility of charge carriers) must be indirectly derived from the measurement outcome by geometrical and electrical modelling; the assumptions behind such models (e.g., uniformity and isotropy, effective value of the applied fields, etc.) require careful consideration. The traceability of the measurement to the International System of units and a proper expression of measurement uncertainty is an issue. This guide focuses on non-contact and high-throughput methods, that are methods where the graphene sample surface is not physically contacted with any metallic electrodes at any stage. A companion guide about contact methods is also available. The methods discussed are: - Measurement of surface potential and work function using Scanning Kelvin Probe Microscopy (SKPM); - Measurement of sheet resistance by Microwave Resonant Cavity; - Measurement of sheet resistance by Terahertz time-domain spectroscopy (THz-TDS); For each method, a corresponding measurement protocol is discussed, which describes: - The measurement principle; - Sample requirements and preparation; - A description of the measurement equipment / apparatus; - Calibration standards and ways to achieve a traceable measurement;
