论文标题

缺陷工程硅的压制

Piezoresistance in defect-engineered silicon

论文作者

Li, H., Thayil, A., Lew, C. T. K., Filoche, M., Johnson, B. C., McCallum, J. C., Arscott, S., Rowe, A. C. H.

论文摘要

稳态的,空间荷尔兰的压电(PZR)的缺陷工程,硅在隔离剂设备层中包含硅离谱缺陷的设备层随着应用偏置的函数而变化的符号。上面是对应于空间充电孔电流的发作的冲压电压($ v_t $),纵向$ \ langle 110 \ langle $ pzr $ pzr $π$ - 效率为$π\ \π\ \ 65 \ 65 \ 65 \ times 10^{ - 11}} $ 〜pa $ 〜pa $ 〜pa $^ - pa $^ - pa $^{ - 1} $ conter,contecte硅。 Below $V_t$, the mechanical stress dependence of the Shockley-Read-Hall (SRH) recombination parameters, specifically the divacancy trap energy $E_T$ which is estimated to vary by $\approx 30$~$μ$V/MPa, yields $π\approx -25 \times 10^{-11}$~Pa$^{-1}$.大大降低了SRH重组寿命的空间充电运输和缺陷工程的结合使这项工作与纳米 - 硅那菌株的巨型或异常PZR的讨论直接相关,其特征性尺寸大于几纳米计。在此限制中,降低的静电尺寸降低了$ v_t $,并放大了空间充电限制电流,并通过表面缺陷发生有效的SRH重组。结果增强了越来越多的证据,即在稳定状态下,电力运动活跃的缺陷可能导致异常但不是巨型。

The steady-state, space-charge-limited piezoresistance (PZR) of defect-engineered, silicon-on-insulator device layers containing silicon divacancy defects changes sign as a function of applied bias. Above a punch-through voltage ($V_t$) corresponding to the onset of a space-charge-limited hole current, the longitudinal $\langle 110 \rangle$ PZR $π$-coefficient is $π\approx 65 \times 10^{-11}$~Pa$^{-1}$, similar to the value obtained in charge-neutral, p-type silicon. Below $V_t$, the mechanical stress dependence of the Shockley-Read-Hall (SRH) recombination parameters, specifically the divacancy trap energy $E_T$ which is estimated to vary by $\approx 30$~$μ$V/MPa, yields $π\approx -25 \times 10^{-11}$~Pa$^{-1}$. The combination of space-charge-limited transport and defect engineering which significantly reduces SRH recombination lifetimes makes this work directly relevant to discussions of giant or anomalous PZR at small strains in nano-silicon whose characteristic dimension is larger than a few nanometers. In this limit the reduced electrostatic dimensionality lowers $V_t$ and amplifies space-charge-limited currents and efficient SRH recombination occurs via surface defects. The results reinforce the growing evidence that in steady state, electro-mechanically active defects can result in anomalous, but not giant, PZR.

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