论文标题

制造双尖扫描隧道显微镜的片上探针

Fabrication of on-chip probes for double-tip scanning tunneling microscopy

论文作者

Leeuwenhoek, Maarten, Groenewoud, Freek, van Oosten, Kees, Benschop, Tjerk, Allan, Milan P., Gröblacher, Simon

论文摘要

在多探针和双尖口STM中降低纳米量表的探针间距离一直是一个长期且技术困难的挑战。最近的多探针系统通过使用两个单独驱动的传统金属电线尖端实现约30 nm的距离,从而实现了重大进展。对于简单对准和固定分离的情况,我们在这里提出了片上双尖设备的制造,这些设备融合了两个机械固定的金尖,只有35 nm的尖端分离。我们利用高质量罪的出色机械,绝缘和介电特性作为一种基本材料,以实现易于实施,石库定义和机械稳定的尖端。凭借其大型接触垫和可调节的足迹,这些新颖的技巧可以轻松地与大多数现有的商业组合STM/AFM系统集成在一起。

Reduction of the inter-probe distance in multi-probe and double-tip STM down to the nanometer scale has been a longstanding and technically difficult challenge. Recent multi-probe systems have allowed for significant progress by achieving distances of around 30 nm using two individually driven, traditional metal wire tips. For situations where simple alignment and a fixed separation can be advantageous, we here present the fabrication of on-chip double-tip devices that incorporate two mechanically fixed gold tips with a tip separation of only 35 nm. We utilize the excellent mechanical, insulating and dielectric properties of high quality SiN as a base material to realize easy-to-implement, lithographically defined and mechanically stable tips. With their large contact pads and adjustable footprint these novel tips can be easily integrated with most existing commercial combined STM/AFM systems.

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