论文标题
从300k到熔点的硅悬臂在本地加热：温度曲线测量的共振频率转移
Silicon cantilevers locally heated from 300K up to the melting point: temperature profile measurement from their resonances frequency shift
论文作者
论文摘要
加热时，微谐振器会出现其共振频率的变化。我们专门研究通过激光吸收在本地加热的硅悬臂，并在理论上和实验中评估其温度曲线以及与机械共振的相互作用。我们提出了早期模型的增强版[F。 Aguilar Sandoval等，J。Appl。物理。 117，234503（2015）]包括弹性和几何温度依赖性，表明后者可以占第一个弯曲模式的观察到的20％。温度剖面描述考虑了由于声子限制而导致的热夹条件，高温下的辐射和低电导率。由于热方程式中的空间功率等效性，沿悬臂扫描加热点直接揭示了温度曲线。最后，频移测量可用于以百分之几的精度来推断温度场。
When heated, micro-resonators present a shift of their resonance frequencies. We study specifically silicon cantilevers heated locally by laser absorption, and evaluate theoretically and experimentally their temperature profile and its interplay with the mechanical resonances. We present a enhanced version of our earlier model [F. Aguilar Sandoval et al., J. Appl. Phys. 117, 234503 (2015)] including both elasticity and geometry temperature dependency, showing that the latter can account for 20% of the observed shift for the first flexural mode. The temperature profile description takes into account thermal clamping conditions, radiation at high temperature, and lower conductivity than bulk silicon due to phonon confinement. Thanks to a space-power equivalence in the heat equation, scanning the heating point along the cantilever directly reveals the temperature profile. Finally, frequency shift measurement can be used to infer the temperature field with a few percent precision.
