论文标题
SEM中的静电电子镜，用于样品的顶部和底部表面的同时成像
Electrostatic electron mirror in SEM for simultaneous imaging of top and bottom surfaces of a sample
论文作者
论文摘要
已经建立了电子镜在像差校正和表面敏感的显微镜技术（例如低能电子显微镜）中的使用。但是，在这项工作中，通过在传统的扫描电子显微镜（SEM）中在样品中实施易于构建的完全静电电子镜系统，我们提出了一种新的成像方案，使我们能够同时形成样品顶部和底部表面的扫描图像。我们认为，这种成像方案对原位SEM的领域可能具有很大的价值，该领域仅限于观察到动态变化，例如一次样品的一侧裂纹传播和其他表面现象。我们分析使用平面与凹面电子镜系统时的图像属性，并讨论两种不同的操作机制。除了原位SEM外，我们预见我们的成像方案可以通过在SEM中使用电子镜子来打开球形像差校正的途径，而无需复杂的梁分离器。
The use of electron mirrors in aberration correction and surface-sensitive microscopy techniques such as low-energy electron microscopy has been established. However, in this work, by implementing an easy to construct, fully electrostatic electron mirror system under a sample in a conventional scanning electron microscope (SEM), we present a new imaging scheme which allows us to form scanned images of the top and bottom surfaces of the sample simultaneously. We believe that this imaging scheme could be of great value to the field of in-situ SEM which has been limited to observation of dynamic changes such as crack propagation and other surface phenomena on one side of samples at a time. We analyze the image properties when using a flat versus a concave electron mirror system and discuss two different regimes of operation. In addition to in-situ SEM, we foresee that our imaging scheme could open up avenues toward spherical aberration correction by the use of electron mirrors in SEMs without the need for complex beam separators.
