论文标题
通过直接激光写作技术制造GE2SB2TE5 Metasurfaces
Fabrication of Ge2Sb2Te5 metasurfaces by direct laser writing technique
论文作者
论文摘要
我们通过实验表明,使用直接激光写作技术,在200 nm厚的GE2SB2TE5膜上制造了可调高对比度周期性渔网元面积,在200 nm厚的GE2SB2TE5胶片上具有3 um时期的3 um时期。我们发现,由于高热电导率,蓝宝石底物的使用提供了更高的跨表面段准确性。该方法的优点包括其简单性,速度,鲁棒性以及制造结构的调整能力。这对于为电信和信息处理领域的应用创建可稳定和可调的元信息至关重要。
We experimentally demonstrate fabrication of tunable high contrast periodic fishnet metasurfaces with 3 um period on 200 nm thick Ge2Sb2Te5 films sputted onto glass and sapphire substrates using direct laser writing technique. We find that the use of sapphire substrate provides better accuracy of metasurface segments due to high thermal conductivity. The advantages of the demonstrated method consist in its simplicity, rapidity, robustness, and the ability of tuning of fabricated structures. This is of crucial importance for the creation of robust and tunable metasurfaces for applications in the field of telecommunications and information processing.