论文标题
具有严格铸造制造约束的光子设备的逆设计
Inverse design of photonic devices with strict foundry fabrication constraints
论文作者
论文摘要
我们引入了一种新的方法，用于纳米光器设备的逆设计，该方法确保了由商业半导体铸造厂所需的最小宽度和间距约束所满足严格的长度限制。该方法采用了几种概念，从机器学习中，将拓扑优化的问题（严格的长度限制）转变为无约束的随机梯度优化问题。具体来说，我们引入了一种有条件的发电机，用于可行设计，并采用直通估算器将梯度反向传播到潜在设计。我们通过设计几种常见的集成光子组件来证明我们方法的性能和可靠性。
We introduce a new method for inverse design of nanophotonic devices which guarantees that resulting designs satisfy strict length scale constraints - including minimum width and spacing constraints required by commercial semiconductor foundries. The method adopts several concepts from machine learning to transform the problem of topology optimization with strict length scale constraints to an unconstrained stochastic gradient optimization problem. Specifically, we introduce a conditional generator for feasible designs and adopt a straight-through estimator for backpropagation of gradients to a latent design. We demonstrate the performance and reliability of our method by designing several common integrated photonic components.
