论文标题
量子纳米结构的优化TEM标本制备方法
An optimized TEM specimen preparation method of quantum nanostructures
论文作者
论文摘要
具有未更改的微结构和化学的电子透明TEM Lamella是成功探索的先决条件。当前，量子纳米结构（例如量子点（QD））的TEM标本制备仍然是一个挑战。在这项工作中，我们优化了通过在SRTIO3（STO）底物上生长的SRRRUO3（SRO）QD组成的高质量TEM样品的样品准备程序。我们证明，与通过三脚架抛光的组合制成的TEM标本相比，与TEM标本相比，与AR+离子铣削制成的TEM标本相比，与TEM标本相比，离子束填充技术的组合可以产生更高质量的量子纳米结构标本。在提出的方法中，在聚焦离子束装置中同时成像可以准确地定位QD区域，并通过切割相对于点阵列的5°倾斜的样品来确保薄膜中的点存在。此外，将TEM板层与几个大型电子透明区域的制备有效地降低了样品的弯曲并提供宽阔的薄区域。最终使用纳米尔会有效地去除无定形层，而无需引入任何额外的损坏。
Electron transparent TEM lamella with unaltered microstructure and chemistry is the prerequisite for successful TEM explorations. Currently, TEM specimen preparation of quantum nanostructures, such as quantum dots (QDs), remains a challenge. In this work, we optimize the sample-preparation routine for achieving high-quality TEM specimens consisting of SrRuO3 (SRO) QDs grown on SrTiO3 (STO) substrates. We demonstrate that a combination of ion-beam-milling techniques can produce higher-quality specimens of quantum nanostructures compared to TEM specimens prepared by a combination of tripod polishing followed by Ar+ ion milling. In the proposed method, simultaneous imaging in a focused ion-beam device enables accurate positioning of the QD regions and assures the presence of dots in the thin lamella by cutting the sample inclined by 5° relative to the dots array. Furthermore, the preparation of TEM lamellae with several large electron-transparent regions that are separated by thicker walls effectively reduces the bending of the specimen and offers broad thin areas. The final use of a NanoMill efficiently removes the amorphous layer without introducing any additional damage.
