论文标题
与生物有机材料及其环境方面相容的温和图案方法
Gentle patterning approaches towards compatibility with bio-organic materials and their environmental aspects
论文作者
论文摘要
材料科学，生物电子和可植入药物的进步，加上最近对环保材料和技术的要求不可避免地为纳米和微观图案技术提出了新的挑战。总体而言，创建微型和纳米结构的重要性是仅在纳米级可以访问的一系列基本和应用特性的动机。光刻是一种至关重要的制造方法家族，可创建原型并以工业规模生产设备。最近，通过在电子产品中实施生物有机系统，可以增强关键电子半导体组件微型化的纯粹趋势。到目前为止，已经做出了重大努力，以寻找新颖的光刻方法并开发旧的方法以与精致的生物有机系统兼容，并最大程度地减少对环境的影响。本文中，我们简要回顾了这种精致的材料和复杂的图案技术。
Advances in material science, bio-electronic, and implantable medicine combined with recent requests for eco-friendly materials and technologies inevitably formulate new challenges for nano- and micro-patterning techniques. Overall, the importance of creating micro and nanostructures is motivated by a large manifold of fundamental and applied properties accessible only at the nanoscale. Lithography is a crucial family of fabrication methods to create prototypes and produce devices on an industrial scale. The pure trend in the miniaturization of critical electronic semiconducting components is recently enhanced by implementing bio-organic systems in electronics. So far, significant efforts have been made to find novel lithographic approaches and develop old ones to reach compatibility with delicate bio-organic systems and minimize the impact on the environment. Herein, we briefly review such delicate materials and sophisticated patterning techniques.
