论文标题
3D大规模融合二氧化硅微流体芯片由混合激光微加工启用，用于连续流量流光化学合成
3D large-scale fused silica microfluidic chips enabled by hybrid laser microfabrication for continuous-flow UV photochemical synthesis
论文作者
论文摘要
我们展示了一种混合激光微分化方法，该方法结合了超快激光辅助化学蚀刻和二氧化碳激光诱导的原位熔化的技术优点，用于几厘米尺度和无键键合作在融合硅胶玻璃中无键的3D复杂微观结构。通过开发的方法，可以可靠地生产具有集成的3D级联微质子单元的大规模融合二氧化硅微流体芯片。使用制成的芯片证明了在〜280 nm处的紫外线LED照射下的高性能在片上混合和连续流量的光化学合成，这表明具有强大的能力，可以在芯片光化学合成中对高度透明的全玻璃全玻璃微流体反应器的多功能性制造。
We demonstrate a hybrid laser microfabrication approach, which combines the technical merits of ultrafast laser-assisted chemical etching and carbon dioxide laser-induced in-situ melting, for centimeter-scale and bonding-free fabrication of 3D complex hollow microstructures in fused silica glass. With the developed approach, large-scale fused silica microfluidic chips with integrated 3D cascaded micromixing units can be reliably manufactured. High-performance on-chip mixing and continuous-flow photochemical synthesis under UV LEDs irradiation at ~280 nm were demonstrated using the manufactured chip, indicating a powerful capability for versatile fabrication of highly transparent all-glass microfluidic reactors for on-chip photochemical synthesis.
