论文标题
用于制造具有纳米级精确性的高性能钻石传感器阵列的自我对准图案技术
Self-aligned patterning technique for fabricating high-performance diamond sensor arrays with nanoscale precision
论文作者
论文摘要
为了有效地使缺陷中心与纳米级精确的光子学结构保持一致，是实现高性能光子设备以及在量子技术中的应用，例如量子传感，可扩展的量子系统和量子计算网络的挑战之一。在这里，我们提出了一种基于常规工程技术的轻松自我对准图案技术，掺杂精度可以达到约15nm。具体而言，我们通过制造钻石纳米圆柱传感器阵列来证明这一技术，该钻石纳米乳杆阵列显示出很高的一致性和近乎最佳的光子计数，高产量接近理论极限，并为不同的NV中心提供了高过滤效率。结合适当的晶体取向，达到了1900 cps^（-1/2）的饱和荧光速率，荧光依赖性检测敏感性最高。该技术适用于所有类似的固态系统，应促进并行量子传感和可扩展信息处理的开发。
To efficiently align the creation of defect center with photonics structure in nanoscale precision is one of the outstanding challenges for realizing high-performance photonic devices and the application in quantum technology such as quantum sensing, scalable quantum systems, and quantum computing network. Here, we propose a facile self-aligned patterning technique wholly based on conventional engineering technology, with the doping precision can reach ~15nm. Specifically, we demonstrate this technique by fabricating diamond nanopillar sensor arrays, which show high consistency and near-optimal photon counts, high yield approaching the theoretical limit, and high filtering efficiency for different NV centers. Combined with appropriate crystal orientation, a saturated fluorescence rate of 4.65 Mcps and the best reported fluorescence-dependent detection sensitivity of 1900 cps^(-1/2) are achieved. This technique applicable to all similar solid-state systems should facilitate the development of parallel quantum sensing and scalable information processing.
