论文标题
用于像素级平面光束生成的高效光栅耦合器
High-efficiency grating couplers for pixel-level flat-top beam generation
论文作者
论文摘要
我们演示了一种光栅耦合器，该耦合器会从光子集成电路中产生高质量的扁平梁，从而产生一个小型梁，从而产生了自由空间。光栅耦合器的设计是在带有220 nm厚的硅层的硅在绝缘子晶圆上设计的，由双蚀刻光栅（DG）和分布式的Bragg反射器（DBR）组成。通过调整DG和DBR的结构参数，具有-0.5 dB的垂直辐射的像素级（6.6 um）扁平梁，并实现了1550 nm时97％的模式匹配。此外，一系列高效的光栅耦合器旨在创建具有不同尺度的平顶梁。
We demonstrate a kind of grating coupler that generates high quality flat-top beam with a small beamwidth from photonic integrated circuits into free-space. The grating coupler is designed on a silicon-on-insulator wafer with a 220 nm-thick silicon layer and consists of a dual-etch grating (DG) and a distributed Bragg reflector (DBR). By adjusting the structural parameters of DG and DBR, a pixel-level (6.6 um) flat-top beam with the vertical radiation of -0.5 dB and the mode match of 97% at 1550 nm is realized. Furthermore, a series of high-efficiency grating couplers are designed to create flat-top beam with different scales.
