论文标题
外延$ \ textrm {nb} _x \ textrm {n} $电影的增长窗户及其结构和超导属性
Growth windows of epitaxial $\textrm{Nb}_x\textrm{N}$ films on c-plane sapphire and their structural and superconducting properties
论文作者
论文摘要
NBN膜通过分子束外延在C平面蓝宝石底物上生长。膜的结构和超导特性的特征是证明了诸如底物温度和主动氮通量等生长参数效应膜的结构相，从而效果超导临界温度。在不同条件下生长的膜发现了四个NBN阶段。在一个新颖的发现中，我们证明了原子上平坦，高度结晶的$β$ - $ \ textrm {nb} _2 \ textrm {n} $胶片可以在1100 \ c或更高的基板温度下生长基于在不同底物温度下生长的膜的测量值，为$ 0.35〜K <T_C <0.6〜K $。
NbN films are grown on c-plane sapphire substrates by molecular beam epitaxy. The structural and superconducting properties of the film are characterized to demonstrate that growth parameters such as substrate temperature and active nitrogen flux effect the structural phase of films, and thereby the superconducting critical temperature. Four phases of NbN are identified for films grown in different conditions. In a novel finding, we demonstrate that atomically flat and highly crystalline $β$-$\textrm{Nb}_2\textrm{N}$ films can be grown at substrate temperatures of 1100 \degree C or higher, and that the superconducting critical temperature of phase pure $β$-$\textrm{Nb}_2\textrm{N}$ films is $0.35~K<T_c<0.6~K$, based on measurements of films grown at different substrate temperatures.
