论文标题
基于双硅在绝缘子插槽微型环谐振器上，无敏感标签和紧凑的超声传感器
Sensitive label-free and compact ultrasonic sensor based on double silicon-on-insulator slot micro-ring resonators
论文作者
论文摘要
我们提出了一个新的无标签超声波传感器，该传感器包括一个插槽波引导和双硅 - 启用器（SOI）插槽微环谐振器。全光传感器不会受到电磁干扰的影响。我们选择在声学谐振膜上集成硅插槽双重环（SDMR）谐振器。研究了几个关键结构参数的优化，以实现基于COMSOL多物理软件的传输频谱模式分布。我们的数值研究表明，与常规压电超声传感器相比，提出的超声传感器具有更高的灵敏度和更大的检测频率范围。对于面积为15UM*30UM的SDMR系统，灵敏度高达2453.7MV/kPa，并且在1-150MHz的带宽范围内。灵敏度值是单个插槽微环超声传感器的敏感性值36倍。 SDMR的理论因子约为1.24*10^6，弯曲半径为5UM。对SDMR系统的研究是对超高Q因子和较大频率范围的光声显微镜的有价值探索。
We propose a new label-free ultrasonic sensor, which comprises a slot wave-guide and double silicon-on-insulator (SOI) slot micro-ring resonators. The all-optical sensors do not suffer from electromagnetic interference. We choose to integrate a silicon slot double micro-ring (SDMR) resonators in an acoustically resonant membrane. Optimization of the several key structural parameters is investigated to achieve the mode-field distributions of transmission spectrum based on Comsol Multiphysics software. Our numerical studies show that the proposed ultrasonic sensor offers higher sensitivity and a larger detection frequency range than conventional piezoelectric based ultrasound transducer. For a SDMR system with an area of 15um*30um, sensitivity as high as 2453.7mv/kpa, and over a bandwidth range of 1-150MHz. The sensitivity value is 36 times higher than that of single slot micro-ring ultrasonic sensor. The theoretical-factor of the SDMR can be approximately 1.24*10^6 with bending radius of 5um. The investigation on the SDMR system is a valuable exploration of the photo-acoustic microscopy for the ultra-high Q factor and large frequency range.
