论文标题
可编程相板可以用作透射电子显微镜（TEM）中的像差校正器吗？
Can a Programmable Phase Plate Serve as an Aberration Corrector in the Transmission Electron Microscope (TEM)?
论文作者
论文摘要
当前可编程静电相的进度提出了有关其对特定应用的有用性的问题。在这里，我们探索了这种相板的不同设计，其特定目标是校正传输电子显微镜（TEM）中的球形像差。我们从数值上研究了一个相板是否可以在常规未校正的TEM上提供至$ngström的空间分辨率1 $Å$Å。评估了不同的设计方面（填充因子，像素模式，对称性），以了解它们对电子探针大小和电流密度的影响。一些提出的设计显示，探头尺寸（$ d_ {50} $）降至0.66 $Å$，证明应该使用由一系列静电相位转换元件组成的可编程相板纠正超过1Å限制的球形像差。
Current progress in programmable electrostatic phase plates raises questions about their usefulness for specific applications. Here, we explore different designs for such phase plates with the specific goal of correcting spherical aberration in the Transmission Electron Microscope (TEM). We numerically investigate whether a phase plate could provide down to 1 $Å$ngström spatial resolution on a conventional uncorrected TEM. Different design aspects (fill-factor, pixel pattern, symmetry) were evaluated to understand their effect on the electron probe size and current density. Some proposed designs show a probe size ($d_{50}$) down to 0.66$Å$, proving that it should be possible to correct spherical aberration well past the 1Å~ limit using a programmable phase plate consisting of an array of electrostatic phase shifting elements.
