论文标题

使用FIB辐射和自动孔边缘分析的高通量纳米孔的制造和分类

High-throughput nanopore fabrication and classification using FIB irradiation and automated pore edge analysis

论文作者

Macha, Michal, Marion, Sanjin, Tripathi, Mukesh, Thakur, Mukeshchand, Lihter, Martina, Kis, Andras, Smolyanitsky, Alex, Radenovic, Aleksandra

论文摘要

大区域纳米孔钻探是最先进的纳米孔2D膜制造方案中的主要瓶颈。此外,对膜的高质量结构和统计描述是预测相应膜范围的渗透特性的关键。在这项工作中,我们研究了Xe-Ion浓缩的离子束,作为在原子薄,独立的钼二硫化物上可扩展的大区块纳米孔制造的工具。提出的辐照方案可以设计具有可调孔隙率和孔隙尺寸的超薄膜,并在大区块底物上设计空间均匀性。使用扫描透射电子显微镜成像来表征制造的纳米多孔膜,并通过孔隙边缘检测脚本分析观察到的纳米几何形状。我们进一步证明,所获得的结构和统计数据可以很容易地传递给计算和分析工具,以预测单个孔隙和膜范围范围的渗透特性。例如,通过广泛的全原子分子动力学模拟,研究了具有Angstrom尺寸孔的膜。我们认为,此处介绍的实验方法和分析方法的组合应产生基于物理的属性估计,因此有可能实现真正逐个设计的方法来制造用于渗透发电,脱盐/过滤及其应变可启动的应用。

Large-area nanopore drilling is a major bottleneck in state-of-the-art nanoporous 2D membrane fabrication protocols. In addition, high-quality structural and statistical descriptions of as-fabricated porous membranes are key to predicting the corresponding membrane-wide permeation properties. In this work, we investigate Xe-ion focused ion beam as a tool for scalable, large-area nanopore fabrication on atomically thin, free-standing molybdenum disulphide. The presented irradiation protocol enables designing ultrathin membranes with tunable porosity and pore dimension, along with spatial uniformity across large-area substrates. Fabricated nanoporous membranes were characterized using scanning transmission electron microscopy imaging and the observed nanopore geometries were analyzed through a pore-edge detection script. We further demonstrated that the obtained structural and statistical data can be readily passed on to computational and analytical tools to predict the permeation properties at both individual pore and membrane-wide scales. As an example, membranes featuring angstrom-scale pores were investigated in terms of their emerging water and ion flow properties through extensive all-atom molecular dynamics simulations. We believe that the combination of experimental and analytical approaches presented here should yield accurate physics-based property estimates and thus potentially enable a true function-by-design approach to fabrication for applications such as osmotic power generation, desalination/filtration, as well as their strain-tunable versions.

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