论文标题

RD51 VMM混合动力车的自动测试系统和第一批产量的产量测量

An automated testing system for the RD51 VMM hybrid and yield measurement of the first production batches

论文作者

Jaekel, Finn, Desch, Klaus, Kaminski, Jochen, Lupberger, Michael, Scharenberg, Lucian, Schwaebig, Patrick

论文摘要

我们介绍了RD51合作的VMM混合动力车的自动测试系统的开发。 VMM混合动力车是RD51通用读数系统(可扩展读数系统)的新的前端板,并将成为未来十年的主力,以读取微图案气态探测器。它使用为Atlas新小轮开发的VMM芯片将电荷信号从检测器转换为数字数据。我们的测试系统自动表征了在多次测试中生产后混合动力车上VMM芯片的质量。评估结果以对芯片和混合动力车进行分类,并上传到数据库。我们评估了前两批生产批次以衡量产量的结果。收益率优于阈值,在晶圆级上进行芯片测试可提供经济利益。对突出的芯片失败的观察回到了混合生产过程,以进一步提高未来生产的产量。

We present the development of an automated testing system for the VMM hybrid of the RD51 collaboration. The VMM hybrid is a new front-end board for the RD51 common readout system, the Scalable Readout System, and will become the workhorse for the next decade to read out Micro-Pattern Gaseous Detectors. It uses the VMM chip developed for the ATLAS New Small Wheel to convert charge signals from detectors to digital data. Our testing system automatically characterises the quality of the VMM chips on the hybrid after production during multiple tests. Results are evaluated to classify the chips and hybrids and uploaded to a database. We evaluated those results for the first two production batches to measure the production yield. The yield is better than the threshold below which chip testing on a wafer level offers financial benefits. Observations on prominent chip failures were propagated back to the hybrid production process to further increase the yield for future productions.

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