论文标题
CCAT-PRIME：在电离光谱仪时期的Fabry-Perot干涉仪的硅镜的设计和表征
CCAT-prime: The Design and Characterization of the Silicon Mirrors for the Fabry-Perot Interferometer in the Epoch of Reionization Spectrometer
论文作者
论文摘要
电源光谱仪的时期（EOR-Spec）是要安装在Fred Young Simbillimeter Telescope（FYST）的启动板接收器中的仪器模块之一。这款六米的孔径望远镜将建在智利Atacama沙漠的Cerro Chajnantor上。 EOR-SPEC设计用于通过使用线强度映射技术在红移z = 3.5和z = 8之间测量[CII]细胞结构线来探测早期恒星形成区域。该模块配备了扫描Fabry-Perot干涉仪（FPI），以实现大约RP = 100的光谱解析能力。FPI由两个平行和相同的高度反射镜组成，清晰的光圈为14厘米，形成一个称为Etalon的谐振空腔。镜子是基于硅的，并用一侧的双层超材料抗反省涂料（ARC）和另一个侧面的金属网眼反射器进行了图案。双层弧确保在一个底物表面的低反射率，并有助于定制FPI带宽上的反射率。在这里，我们介绍FPI的硅镜的设计，制造过程，测试设置和表征。
The Epoch of Reionization Spectrometer (EoR-Spec) is one of the instrument modules to be installed in the Prime-Cam receiver of the Fred Young Submillimeter Telescope (FYST). This six-meter aperture telescope will be built on Cerro Chajnantor in the Atacama Desert in Chile. EoR-Spec is designed to probe early star-forming regions by measuring the [CII] fine-structure lines between redshift z = 3.5 and z = 8 using the line intensity mapping technique. The module is equipped with a scanning Fabry-Perot interferometer (FPI) to achieve the spectral resolving power of about RP = 100. The FPI consists of two parallel and identical, highly reflective mirrors with a clear aperture of 14 cm, forming a resonating cavity called etalon. The mirrors are silicon-based and patterned with double-layer metamaterial anti-reflection coatings (ARC) on one side and metal mesh reflectors on the other. The double-layer ARCs ensure a low reflectance at one substrate surface and help tailor the reflectance profile over the FPI bandwidth. Here we present the design, fabrication processes, test setup, and characterization of silicon mirrors for the FPI.
