论文标题
在绝缘晶片中对声学共振的非接触式激发
Contactless Excitation of Acoustic Resonance in Insulating Wafers
论文作者
论文摘要
使用射频光谱技术描述了薄绝缘单晶中的无接触式激发和检测高谐波声泛音。研究了单晶[001]硅晶圆样品，一侧覆盖着NB薄膜，这是制造量子设备的常见起点。电磁信号与机械振荡之间的耦合是从外部磁场产生的洛伦兹力实现的。此方法适用于具有金属表面或覆盖有薄金属膜的任何样品。据报道，硅速度和弹性常数的温度依赖性的高分辨率测量已报道，并将其与已知结果进行了比较。
Contactless excitation and detection of high harmonic acoustic overtones in a thin insulator single crystal are described using radio frequency spectroscopy techniques. Single crystal [001] silicon wafer samples were investigated, one side covered with a Nb thin film, the common starting point for fabrication of quantum devices. The coupling between electromagnetic signals and mechanical oscillation is achieved from the Lorentz force generated by an external magnetic field. This method is suitable for any sample with a metallic surface or covered with a thin metal film. High resolution measurements of the temperature dependence of the sound velocity and elastic constants of silicon are reported and compared with known results.
