论文标题
对分级GAASP/BOLK SI底物的单层整合940 nm藻类分布的bragg反射器的研究
Study of monolithically integrated 940 nm AlGaAs distributed Bragg reflectors on graded GaAsP/bulk Si substrates
论文作者
论文摘要
我们报告了在分级GAASP/SI底物上单一集成的940 nm藻类分布的Bragg反射器（DBR）的制造。在DBR表面上观察到低密度的表面凸起和交叉饰面模式。横截面DBR层光滑且平坦。 GAASP/SI DBR的反射光谱的强度低于GAAS DBR，并且具有双峰。进行了转移矩阵方法的计算，表面刮擦和抛光测试，这表明表面交叉围场是DBR下方反射光谱的原因。
We report the fabrication of monolithically integrated 940 nm AlGaAs distributed Bragg reflectors (DBRs) on graded GaAsP/Si substrates. Low-density surface bumps and cross-hatch patterns were observed on the DBR surfaces. Cross-sectional DBR layers are smooth and flat. The reflectance spectra of the GaAsP/Si DBRs have lower intensities than the GaAs DBRs and have double peaks. Transfer matrix method calculations, surface scratch and polishing tests were conducted, which suggest that the surface cross-hatch was the cause of the inferior DBR reflectance spectra.
