论文标题
高速光电探测器与蒸发的柜薄膜的平台无形波导整合
Platform-agnostic waveguide integration of high-speed photodetectors with evaporated tellurium thin films
论文作者
论文摘要
由于固有的材料不兼容和缺乏过程可伸缩性，许多有吸引力的光子水平平台仍然缺乏集成的光电探测器，从而阻止了它们广泛的部署。在这里，我们解决了以光子平台无关的方式可稳定地集成光电视图的问题。使用针对纳米电子学开发的热蒸发和沉积技术，我们表明，柜（TE）是一种准2D半导体元件，可以直接在低温下蒸发到光子芯片上，形成空气稳定的高反应性，高速，高速，超级伴随光电射击器。我们在可见的，电信和中红外波长，超过40 GHz的带宽以及与硅，硝酸硅和硝酸锂的光子结构中的可伸缩相结合以及无独立的可伸缩整合。
Many attractive photonics platforms still lack integrated photodetectors due to inherent material incompatibilities and lack of process scalability, preventing their widespread deployment. Here we address the problem of scalably integrating photodetectors in a photonic platform-independent manner. Using a thermal evaporation and deposition technique developed for nanoelectronics, we show that tellurium (Te), a quasi-2D semi-conductive element, can be evaporated at low temperature directly onto photonic chips to form air-stable, high-responsivity, high-speed, ultrawide-band photodetectors. We demonstrate detection at visible, telecom, and mid-infrared wavelengths, a bandwidth of more than 40 GHz, and platform-independent scalable integration with photonic structures in silicon, silicon nitride and lithium niobate.
