论文标题
损耗引起的高密度多模式集成波导阵列
Loss-induced high-density multi-mode integrated waveguides array
论文作者
论文摘要
光子整合电路的积分密度受波导之间的光耦合的限制。使用高密度的波导的传统方法基于折射率工程,以抑制波导之间的光耦合。但是,这些方法主要需要复杂且敏感的结构设计,因此缺乏普遍性。本文中,我们提出了高密度多模式 - 核核心集成波导,通过在波导之间插入高损耗的金属条。我们已经达到了10个空间通道多模式 - 核核波导,总占用间距为6.6 um。多模式波导的紧密间距为400 nm。所提出的方案具有较高的制造耐受性,超大带宽以及与互补金属氧化物 - 氧化型技术技术的良好兼容性。它可以应用于任何集成平台,任何工作波段和任何操作模式,为高密度光子电路提供通用解决方案。
The integration density of photonic integrated circuits has been limited by light coupling between waveguides. Traditional approaches to layout the waveguide with high density are based on refractive index engineering to suppress the light coupling between waveguides. However, these methods mostly require sophisticated and sensitive structure design, thus lack universality. Herein, we propose high-density multi-mode-multi-core integrated photonic waveguides by inserting high-loss metal strips between waveguides. We have achieved a 10-spatial-channel multi-mode-multi-core waveguide with total occupying spacing of 6.6 um. The multi-mode waveguides have a close spacing of 400 nm. The proposed scheme has high fabrication tolerance, ultra-large bandwidth and good compatibility to the complementary metal-oxide-semiconductor technology. It can be applied to any integration platform, any working waveband and any operating mode, providing a universal solution for high-density photonic circuits.