论文标题

基于氮化硅的高速,调整,电流调制器

A Silicon Nitride Microring Based High-Speed, Tuning-Efficient, Electro-Refractive Modulator

论文作者

Karempudi, Venkata Sai Praneeth, Thakkar, Ishan G, Hastings, Jeffrey Todd

论文摘要

在实现CMOS兼容,高性能的光子集成电路(PICS)方面,使用硅在绝缘子(SOI)平台的使用非常突出。但是近年来,二氧化硅二氧化硅(sin-on-sio $ _2 $)平台已获得了越来越多的兴趣,作为实现高性能图片的SOI平台的替代品。这是因为它在SOI平台上具有多种有益的特性,例如低光损耗,高热光稳定性,更广泛的波长透明度范围以及对制造过程变化的高耐受性。但是,由于缺乏基于自由运营商的活动,以及将其他活跃材料与Sin-on-Sio $ _2 $平台集成在一起的复杂性,因此,基于SIN-SIO $ _2 $的主动设备(例如调制器)稀少且缺乏所需的性能。这个缺点阻碍了用于实现主动图片的罪恶$ _2 $平台。为了解决这一缺点,我们在本文中演示了基于罪恶的$ _2 $微孔谐振器(MRR)活动调制器。我们设计的MRR调节剂采用二键蛋白氧化物(ITO)-sin-ito薄膜堆栈,其中ITO薄膜充当Sin MRR的上和下覆层。 ITO-SIN-ITO薄膜堆栈利用ITO膜中的自由载体辅助,高振幅折射率变化,以实现设备中大型的电流光学调制。根据使用光子学铸造验证工具进行的静电,瞬态和有限差时间域(FDTD)模拟,我们表明我们的调制器可实现280 pm/v共振调节效率,67.8 GHz 3-DB调制带宽调节带宽,$ \ sim $ \ sim $ \ sim $ \ sim $ sim $10。以30 Gb/s为单位的光学上关键(OOK)调制的DB灭绝率。

The use of the Silicon-on-Insulator (SOI) platform has been prominent for realizing CMOS-compatible, high-performance photonic integrated circuits (PICs). But in recent years, the silicon-nitride-on-silicon-dioxide (SiN-on-SiO$_2$) platform has garnered increasing interest as an alternative to the SOI platform for realizing high-performance PICs. This is because of its several beneficial properties over the SOI platform, such as low optical losses, high thermo-optic stability, broader wavelength transparency range, and high tolerance to fabrication-process variations. However, SiN-on-SiO$_2$ based active devices such as modulators are scarce and lack in desired performance, due to the absence of free-carrier based activity in the SiN material and the complexity of integrating other active materials with SiN-on-SiO$_2$ platform. This shortcoming hinders the SiN-on-SiO$_2$ platform for realizing active PICs. To address this shortcoming, we demonstrate a SiN-on-SiO$_2$ microring resonator (MRR) based active modulator in this article. Our designed MRR modulator employs an Indium-Tin-Oxide (ITO)-SiN-ITO thin-film stack, in which the ITO thin films act as the upper and lower claddings of the SiN MRR. The ITO-SiN-ITO thin-film stack leverages the free-carrier assisted, high-amplitude refractive index change in the ITO films to effect a large electro-refractive optical modulation in the device. Based on the electrostatic, transient, and finite difference time domain (FDTD) simulations, conducted using photonics foundry-validated tools, we show that our modulator achieves 280 pm/V resonance modulation efficiency, 67.8 GHz 3-dB modulation bandwidth, $\sim$19 nm free-spectral range (FSR), $\sim$0.23 dB insertion loss, and 10.31 dB extinction ratio for optical on-off-keying (OOK) modulation at 30 Gb/s.

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