论文标题
更改hf $ _ {0.5} $ zr $ _ {0.5} $ o $ $ $ _ {2} $的属性,并在用不同的电极材料的铁电容循环重极化期间
Changing the properties of Hf$_{0.5}$Zr$_{0.5}$O$_{2}$ during cyclic repolarization of ferroelectric capacitors with different electrode materials
论文作者
论文摘要
在发现氧化物hafnium的铁电性后,提高了对铁电非挥发记忆作为低功耗电子记忆的候选者的兴趣。 hafnia膜的不同元素掺杂可以改善其铁电特性。在这项工作中,将传输实验与模拟结合,以研究铁电特性的演化以及在金属氧化物中氧化物中氧化物中氧化物中的氧气空位之间的平均距离,以研究不同金属电极的影响。
The interest in the ferroelectric non-volatile memory as a candidate for low power consumption electronic memories was raised after the discovery of ferroelectricity in hafnium oxide. Doping by different elements of hafnia films allows improving their ferroelectric properties. In this work, the transport experiments are combined with the simulations to study the evolution of ferroelectric properties and the mean distance between oxygen vacancies during the endurance of hafnium-zirconium oxide in metal-ferroelectric-metal structures to study the impact of different metal electrodes.